May 22 (Fri) AndTech WEB Online Zoom Seminar: "Overview and Basic Principles of Inspection and Analysis Technology in Semiconductor Processes, and the Latest Trends in New Analysis Technology Combining Light and Electrons"

AndTech Co., Ltd. (Headquarters: Kawasaki, Kanagawa; President: Masao Suyama; hereinafter "AndTech"), as part of its R&D development support Zoom seminar series, will hold a "Semiconductor Process Inspection and Analysis Technology" course to meet the growing need for problem-solving in this field, featuring a leading expert as the instructor.

The speaker, who specializes in condensed matter physics and has experience in device development at a semiconductor manufacturer, will provide a detailed introduction to the latest trends in advanced semiconductors, the inspection and analysis technologies that will be required in the future, and in particular, "new inspection methods using light and electrons" that have been under development in recent years.

This course is scheduled to be held on May 22, 2026.

Details: https://andtech.co.jp/seminars/1f101a25-cbc4-647a-80ad-064fb9a95405

Live Streaming/WEB Seminar Overview ────────────────── Theme: Overview and Basic Principles of Inspection and Analysis Technology in Semiconductor Processes, and the Latest Trends in New Analysis Technology Combining Light and Electrons Date and Time: Friday, May 22, 2026, 13:00-16:30 Participation Fee: 45,100 yen (tax included) *Materials will be distributed electronically URL: https://andtech.co.jp/seminars/1f101a25-cbc4-647a-80ad-064fb9a95405 WEB Streaming Format: Zoom (URL will be sent after registration)

Seminar Content Structure ──────────── - Program/Instructor - Mr. Hirokazu Fujiwara, Graduate School of Frontier Sciences, The University of Tokyo / (Former) Kioxia

Knowledge and Technical Issues Addressed in This Seminar ─────────────────────── - Basic principles and characteristics of optical inspection equipment, electron microscopes, probe microscopes, etc. - Types and characteristics of inspection technologies required in semiconductor processes - Trends in semiconductor devices and processes, the latest trends in inspection and analysis technology, and future prospects

Seminar Participation Format ───────────── This is a live streaming seminar using the web conferencing tool "Zoom." Details will be provided after registration.

About AndTech Co., Ltd. ──────────── We provide research and development support services by offering information to clients engaged in R&D across a wide range of fields, including chemicals, materials, electronics, automobiles, energy, medical devices, food packaging, and building materials. We have a team of top-tier instructors and provide various services starting with "technical workshops and seminars," as well as "instructor dispatch," "publishing," "consultant dispatch," "market trend research," "business matching," and "business development consulting." We listen to our clients' voices and provide effective support to help them enter their desired new business areas and markets. https://andtech.co.jp/

AndTech Co., Ltd. Technical Workshop List ───────────────── We hold numerous web seminars by top-tier instructors every month. https://andtech.co.jp/seminars/search

AndTech Co., Ltd. Book List ────────────── We publish books by selecting high-demand topics from a wide range of carefully chosen subjects. https://andtech.co.jp/books

AndTech Co., Ltd. Consulting Services ───────────────────── We dispatch highly specialized technical consultants with extensive experience and track records. https://andtech.co.jp/business-consulting

Inquiries Regarding This Matter ───────────── AndTech Co., Ltd. Public Relations: Aoki Email address: pr●andtech.co.jp (Please change ● to @ to contact us)

Full Program Details (Please see below if you are interested in the details) ────────────────────────────────────────────── [Lecture Abstract] Evaluating the "quality" of semiconductor devices through inspection and analysis is an essential process from all perspectives, including device development, process development, manufacturing costs, and quality assurance. The devices that make up modern advanced logic and memory semiconductor integrated circuits are not only shrinking in size but are also becoming three-dimensional. As semiconductor device generations advance, the problem of how to inspect devices with fine and complex structures is growing significantly.

This course aims to provide an understanding of the overall picture and basic principles of inspection and analysis technology in semiconductor processes, and to understand what technologies are being developed based on the trends in semiconductor integrated circuits. In particular, we will provide a detailed explanation of new analysis technologies that combine light and electrons. The lecture is designed to be helpful for those involved in inspection and analysis in semiconductor device/process development and manufacturing.

[Program] 1. Semiconductor Processes and Inspection 1-1. Semiconductor Integrated Circuit Roadmap 1-2. Basics of Semiconductor Processes 1-3. Types and Applications of Inspection During Semiconductor Processes 2. Basics of Optical Inspection 2-1. Optical Microscopes 2-2. Laser Microscopes 2-3. White Light Interferometers 2-4. Wafer Defect Inspection Equipment 2-5. Mask Inspection Equipment 3. Basics of Electron Beam Inspection 3-1. Scanning Electron Microscope (SEM) 3-2. Transmission Electron Microscope (TEM) 3-3. Scanning Transmission Electron Microscope (STEM) 3-4. Electron Energy Loss Spectroscopy (EELS) 4. Basics of Scanning Probe Inspection 4-1. Atomic Force Microscope (AFM) 4-2. Scanning Capacitance Microscope (SCM) 4-3. Scanning Spreading Resistance Microscope (SSRM) 4-4. Kelvin Probe Force Microscope (KPFM) 5. Recent Trends in Inspection and Analysis Technology 5-1. Growing Demands and Technical Challenges from Semiconductor Manufacturing Sites 5-2. Lithography Inspection - Resist Shape/Chemical Analysis 5-3. Wafer Defect Inspection - Non-destructive Inspection of SiC Wafers 5-4. Mask Defect Inspection - Phase Defect Detection in EUV Mask Blanks 5-5. Advanced Process/Device Inspection - Recess Process Analysis for GAA Transistors 6. Future Prospects and Summary [Q&A]

[Keywords] Advanced semiconductors, process inspection, physical analysis

[Lecture Highlights] The speaker, who specializes in condensed matter physics and has experience in device development at a semiconductor manufacturer, will introduce the inspection and analysis technologies that will be required in the future based on the trends in advanced semiconductors. In addition to providing a comprehensive explanation of various microscopic inspection methods, the lecture will also provide a detailed introduction to new inspection methods using light and electrons that have been under development in recent years.

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