Liquid Flow Meter Supporting 80 Types of Chemicals Launched, Reducing Flow Errors Due to Liquid Temperature Changes

Multi-Flow R™ (MFR) With/Without Display

Challenges in Flow Management for Semiconductor and Chemical Processes

In semiconductor manufacturing equipment and chemical supply facilities, challenges include selecting appropriate materials for the wetted parts based on the fluid used and flow errors caused by changes in liquid temperature.

Multi-Flow R achieves compatibility with various chemicals and stable flow measurement through its New PFA wetted structure and temperature compensation function.

Benefits of Introducing Multi-Flow R™

It compensates for flow fluctuations due to temperature changes, contributing to stable flow management and quality maintenance in wet processes.

Temperature Compensation Function

Typical Vortex Flow Meter (without temperature compensation)

When the fluid temperature changes, the vortex frequency fluctuates due to factors like viscosity changes. This affects the detection signal, potentially leading to errors in flow measurement accuracy.

This necessitates monitoring and manual valve adjustments, increasing labor costs.

Multi-Flow R™

Equipped with a temperature sensor in the flow path, it automatically compensates for flow rate even when the water temperature changes, eliminating the need for monitoring and adjustment.

Product Features

Reduces accuracy errors due to liquid temperature changes by measuring fluid temperature with a built-in temperature sensor and applying temperature compensation.

Uses only New PFA for wetted parts, compatible with approximately 80 types of chemicals.

Compact design, with no moving parts or O-rings.

Supports a wide range of flow rates (from 0.3 to 2.5 L/min up to 10 to 100 L/min).

Specifications

Flow Range: 0.3 to 100 L/min
Flow Accuracy: ±2% F.S. (MFR301/302/303/304), ±3% F.S. (MFR305)
Temperature Accuracy: ±2℃ ±0.15×ΔT℃ (ΔT: Ambient Temperature – Fluid Temperature)
Wetted Material: New PFA
Connection Size: 3/8" to 1" tube end
Fluid Temperature: 0 to 90℃
Output: Signal Output (4-20mA / Pulse), Alarm Output (Alarm Contacts: 2 points, NPN open collector output *Display model only)
List of Compatible Chemicals: See table below

List of Compatible Chemicals

Future Development

This product is planned for deployment to manufacturers of industrial equipment that use fluids such as chemicals and pure water, including semiconductor manufacturing equipment manufacturers. In the future, Regal Joint plans to expand its product lineup according to application needs, contributing to the high efficiency of piping and space-saving of equipment in the industrial equipment sector.

The product is scheduled to be released on June 15, 2026 (Monday), with shipments expected to begin in the summer of 2026 or later.

Distributor Information

Regal Joint Co., Ltd.

Since its founding in 1974, Regal Joint has been engaged in the comprehensive development, manufacturing, and sales of original products, leveraging its unique vacuum and piping technologies related to fluids, gases, and piping.

The company's business is broadly divided into four segments: Fluid Control Equipment, Environmental Business, Contract Manufacturing, and Heat Exchanger Business. These businesses are utilized in a wide range of fields, from cutting-edge areas such as chemicals, machinery, electricity, and electronics, to food, livestock, and medical industries.

Regal Joint Co., Ltd. HP: https://rgl.co.jp/