Launch of the CS-900F Fiber-Optic Non-Contact Chemical Concentration Monitor

HORIBA Advanced Techno Co., Ltd. (Headquarters: Kyoto, Japan; President: Kentaro Nishikata), a member of the HORIBA Group responsible for water and liquid measurement, will launch the CS-900F fiber-optic non-contact chemical concentration monitor on March 26, 2026.

The "CS" series, which measures the concentration of chemicals used in semiconductor manufacturing processes such as cleaning and etching, has continued to evolve since its launch in 1995 to meet customer needs.

The new "CS-900F" adopts a method that allows for non-contact measurement of chemicals simply by attaching it to piping, reducing the risk of chemical leaks and contamination. By introducing fiber-optic cables and relocating the spectrometer to the main unit, the volume of the cell unit installed inside the equipment has been reduced by approximately 60% compared to previous models. While achieving significant miniaturization, it is equipped with an internal reference mechanism known for its stability. This allows for a reduced footprint within the equipment while maintaining high measurement accuracy by minimizing the influence of external disturbances.

Furthermore, the range of compatible chemicals has been expanded, renewing the model as the flagship of the "CS" series with enhanced stability and versatility.

【Development Background】

Chemical processing in semiconductor manufacturing is a critical step that affects yield, as it influences the uniformity of surface treatment, requiring strict management of chemicals. To address this, the "CS-900" non-contact chemical concentration monitor was launched in 2019, allowing measurement results to be obtained without touching the chemicals inside the pipes.

This successor product adopts fiber-optic technology to meet the common demand in the semiconductor industry for a reduced footprint. This has reduced the volume of the cell unit installed in customer equipment by approximately 60%. Leveraging the technology cultivated over the 30-year history of the "CS" series, we aim for further market expansion while closely aligning with market needs.

【Product Features】

1. Achieving both miniaturization and stable measurement

This non-contact measurement product can be easily used by simply attaching the cell unit to the piping within the customer's equipment.

By introducing a system that connects the main unit and the cell unit with fiber-optic cables, it has become possible to move the spectrometer, which was previously built into the cell unit, to the main unit installed outside the customer's equipment. This reduced the volume of the cell unit by approximately 60% compared to conventional models. In addition to relocating the spectrometer to the main unit, the cell unit incorporates a highly stable reference, a strength of the CS series, which contributes to stable measurement by reducing the influence of external disturbances such as vibrations.